Hexafluoroethane
- R 116
- Freon 116
- Perfluoroethane
- FC -116
Colorless, odorless gas
Gaseous
6.25 kg · m -3 ( under normal conditions)
-101 ° C
-78.2 ° C
Slightly soluble in water
Attention
-1344.2 KJ / mol
Template: Infobox chemical / molecular formula search available
Hexafluorethane is a chemical compound from the group of fluorocarbons and is a saturated aliphatic fluorocarbon a perfluorocarbon.
Properties
In compressed gas cylinders hexafluorethane is available as a compressed gas. Under 19.7 ° C under pressure, it is a liquefied gas vorliegendes. When flowing the liquid or at the escape of large quantities of gas to cold mists that spread on the ground form. Above 800 ° C to decompose the compound, with hydrogen fluoride, carbon monoxide and carbon dioxide formed. The critical point is located at 19.89 ° C, 30.39 bar and 0.601 kg · l -1; the triple point at -100.10 ° C and 0.26490 bar.
Hexafluorethane has a GWP of 9,200 and an ozone depletion potential of 0
Use
Hexafluoroethane is used in the semiconductor industry as etching gas and the plasma, as well as for cleaning CVD chambers. It also serves as a propellant gas, a gaseous insulating material ( in the foamed material ) and as a cooling agent. Large quantities of hexafluoroethane are released during the production of aluminum.
Safety
Hexafluorethane is heavier than air and asphyxiation in high concentrations.