Mass flow controller

A mass flow controller (Mass flow controller, MFC ) is a device with which a mass flow is regulated to a desired value. For each fluid own calibration data must be loaded, which is done via a programming interface. In addition to a mass flow meter ( MFM ) is an MFC includes a programmable controller and a proportional valve. Common sensors used for this controller are the calorimetric flow meter and the Coriolis mass flowmeter.