Microelectromechanical systems
A micro system is a miniaturized device, an assembly or a component whose components have the smallest dimensions ( in the micrometer range ) and work together as a system.
Usually there is a microsystem from one or more sensors, actuators, and control electronics on a substrate or chip. Here, the size of the individual components is moved in the range of a few micrometers. The distinction is to be seen on the nano-systems, which is another order of magnitude are below.
Microsystems technology is the study of the development of microsystems and of the techniques for their realization.
Term
With regard to the term micro system is available in the English literature, no uniform terms. The simple translation microsystems is hardly used ( if so, then in Europe ). More commonly, originating from the United States Terms microelectromechanical systems and micro opto electro mechanical systems or their catchy acronyms MEMS and MOEMS. In Asian (mainly Japanese ) publications, however, there is also the " Advanced " designation micromachines.
General Structure
Microsystems based on earlier semiconductor electronics, at that time was the base material (substrate ) usually silicon, but gallium arsenide. The microelectronics is limited to electrical components such as transistors ( CPU) and capacitors (RAM). Today, micro- systems can also be inexpensively manufactured from plastic, and the results in the field of materials research can be used for multifunctional systems. In microsystems technology, the possibilities of semiconductor materials are expanded by mechanical, optical, chemical and / or biological components and functions.
Benefits
Micro systems offer advantages over conventional " macro systems " primarily benefits in cost savings ( low consumption of materials, parallel production) and the efficiency ( low energy and power requirements enables autonomous systems ). In addition, they offer a wide range of functions, high functional densities, new functionality ( integration of electrical and non-electrical functions). Through the integration and miniaturization "new" physical effects can be exploited, and the short information paths lead to short reaction times. In addition, they usually have a higher reliability than conventional systems, mainly due to the elimination of connectors and cables.
Areas of application
The use of microsystems is everywhere feasible and useful, where sensors / actuators and electronics work together. Medical devices and products in the fields of security technology, sports, life sciences and logistics can with the help of micro-systems more versatile, easier, smarter, smaller and more powerful.
Inertial sensors
One of the major applications include inertial sensors ( acceleration and rotation sensors ). They are made for a long time on a large scale and are recognized for the triggering of airbags for the detection of the free-fall of hard drives (for mobile applications) - they realize here is whether a device is in free fall, so that the read head still during of the fall can be placed in park position - or used as position detection in digital cameras, handheld computers and modern input devices for game consoles. They are also used in photo and video cameras for the realization of mechanical and digital image stabilizer to reduce blur from images. Even the world of radio controlled models, the sensors are used in the form of stabilization systems.
Optical actuators
Optical applications for micro systems, for example, blocks in video projectors that are used to display images (see Mikrospiegelaktor ).
Microfluidics
Examples of microsystems from microfluidics are bubble-jet printheads modern printers or plastic lab-on -a- chip systems with integrated valve functions. Another well-known example of a microsystem is also not yet commercially available, Millipede memory (as of January 2009).
Microphones
There are condenser microphones in microsystem technology (English MEMS microphone ), in which the electrical capacitance changing micro diaphragm is etched directly onto the silicon wafer. When the readout electronics are integrated with a preamplifier, and an analog- to-digital converter directly adjacent to the membrane on the wafer in an application specific integrated circuit (ASIC) (commonly used as components in CMOS technology ) and the microphone thus has a digital output, to be such devices also referred to as digital microphones. Such microphones are available from vendors such as Analog Devices, Infineon, NXP Semiconductors or Omron. Because of the small size, low power consumption, good shielding of noise and the cost of production, these microphones are increasingly installed in small mobile devices such as smart phones, headsets, hearing aids and cameras.
Oscillators
A further field of application MEMS oscillators as an inexpensive substitute for quartz oscillators.
Market Overview
According to the 8th Report Status of the MEMS Industry Yole Développement exist from currently (2012 ) developing 350 or MEMS manufacturing companies for more than 200 different applications, with above represent the significant volume. The MEMS market will grow, according to Yole in the next 6 years to 2017 average in volume by 20 % and sales by 13% per year from 11 billion U.S. dollars to 21 billion U.S. dollars. Are worth mentioning here, especially in the so-called integrated manufacturers Texas Instruments, Hewlett -Packard, Analog Devices, Robert Bosch GmbH, as well as contract manufacturer ( foundry ) as, inter alia, STMicroelectronics, Dalsa and X -FAB.