Nanolithography

As nanolithography method is called, which are in principle suitable for producing structures on the order of a few nanometers. These include, for example, EUV, electron beam and nano imprint lithography. They are used where a structure using conventional photolithography is no longer possible, and this should therefore continue to peel in the production of integrated circuits. Other applications are in the field of nanotechnology, for example in the production of micro systems, such as micro- reactors.

• Nanotechnology
• Lithography ( Semiconductor Technology )