Trichlorofluorosilane

Siliciumtrichloridfluorid

Colorless gas

Gaseous

-121 ° C

12 ° C

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Trichlorfluorsilan is an inorganic chemical compound of silicon from the group consisting of silicon tetrahalides.

Production and representation

Trichlorfluorsilan ( as well as other Fluorchlorsilane ) can be obtained as a catalyst by the reaction of sodium hexafluorosilicate and aluminum chloride or by halogen exchange in silicon tetrachloride, antimony (III ) fluoride, and antimony (V ) chloride.

Properties

Trichlorfluorsilan is a colorless, very sensitive to hydrolysis gas.

Use

Trichlorfluorsilan can be used in the semiconductor industry for the deposition of silicon layers.