Dichlorosilane

DCS

Highly flammable, colorless gas with a pungent odor

Gaseous

-122.0 ° C

8.4 ° C

1.666 bar (20 ° C)

Hydrolysis in water

Risk

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Dichlorosilane is a chemical compound selected from the group of chlorinated silanes.

Production and representation

Dichlorosilane can be obtained by disproportionation of trichlorosilane on suitable catalysts.

Properties

Dichlorosilane is a highly flammable, corrosive, liquefied gas under pressure. It forms on contact with moist air a hydrochloric fog. In water it hydrolyzes to hydrogen chloride and a mixture of polymeric siloxanes. Above a temperature of 55 ° C, the compound decomposed to hydrogen chloride and, in small amounts of hydrogen and chlorine. There is a risk of self-ignition. It is sensitive to oxygen and ultraviolet light. The compound has a critical temperature of 176.3 ° C, a critical pressure of 43.78 bar, a critical density of 0.479 kg / l and a triple point temperature of -122 ° C (melting temperature). The heat of vaporization is 249 kJ / kg.

Use

Dichlorosilane is used in semiconductor production in the chemical vapor deposition or epitaxial growth in a mixture with ammonia in the production of silicon nitride or silicon dioxide.

Safety

The vapors of dichlorosilane can form (-28 ° C, ignition temperature 185 ° C flash point) with air to form an explosive mixture.