Electron Backscatter Diffraction

Electron backscatter diffraction ( EBSD ) is a crystallographic technique by which the structure of the crystals can be analyzed.

EBSD systems are mostly used in scanning electron microscopes or transmission electron microscopes. The operation is that the incident primary electron inelastically scattered by the atoms of the sample and the result is a divergent source in the sample. The sample is usually clamped to an angle of 70 °. Now, if so take some electrons on lattice surfaces that the Bragg condition is satisfied, then there is constructive interference. This gain is now done for all grid areas in the crystal, which causes the resulting diffraction pattern ( engl.: electron backscatter pattern, EBSP, also Kikuchi pattern) includes all angular relationships in the crystal and thus the crystal symmetry. The resulting diffraction pattern is recorded using a phosphor screen.

The use of the high spatial resolution of Elektronenmiskroskopen ( ~ 10 nm) and automated image analysis with the aid of computers allows the spatially resolved determination (mapping ) of the crystal symmetries (crystal structure ) and their orientation ( crystal orientation ), as well as with appropriate software and high-resolution detection, the analysis of material stresses ( strain analysis).