Electron beam physical vapor deposition

An electron beam evaporator is a device for the evaporation of solids. The electron beam evaporator is one of the thermal evaporators. The evaporation energy is placed in a crucible with the Verdampfergut means of an electron gun. For small samples, so-called mini - electron-beam evaporation have prevailed, in which the electron beam directly to a bar to be evaporated ( Ø2 -6 mm) or introduced into a crucible. Especially the rod - evaporation has many advantages such as: high-purity layers, no problems with alloy crucible, evaporation from all directions ( even downwards) etc..

Since you do with the electron beam evaporation achieve very high energy densities and temperatures, all known solid materials can be evaporated, and tungsten, carbon, ceramics, etc. Since electron beam guns require a vacuum, all applications of the electron beam evaporator vacuum processes. In comparison to other thermal vaporisers one achieves high rates of evaporation by electron beam evaporators.

Applications

Electron beam evaporators are used in the coating technique to deposit thin layers by vapor deposition, for example, anti - reflective coatings, hard coatings on optical surfaces (eg lenses ), or effect layers on paper or plastic films.

  • Physical vapor deposition
  • Surface Physics
  • Semiconductor Technology
  • Chemical- technical process
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