Hexachlorodisilane

Colorless liquid

Liquid

1.562 g · cm -3 ( 25 ° C)

2.5 ° C

144 to 145.5 ° C

1.475 (20 ° C)

Risk

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Hexachlorodisilane is a chemical compound selected from the group of chlorinated silanes.

Production and representation

Hexachlorodisilane can (like all Perchlorsilane SinCl2n 2 where n = 2-6) are obtained by reaction of calcium silicide with chlorine at from 230 to 250 ° C.

Also possible is the preparation by reaction of silicon dichloride and silicon with chlorine.

Properties

Hexachlorodisilane is a colorless, fuming in air, hydrolysis clear liquid.

Use

Ultra-high purity hexachlorodisilane is in the semiconductor industry for the chemical vapor deposition of silicon-containing functional layers, at very low temperatures are used. Plants for Herstelluing for example be in Rheinfelden.