International Technology Roadmap for Semiconductors

The International Technology Roadmap for Semiconductors ( ITRS ) is a forecast on the future development of semiconductor technology, which is considered the common thread for chip and device manufacturers. It is updated every two years by a panel of global experts from the semiconductor industry. In addition, in the intervening years there is a small update.

The development of the performance of microelectronic circuits is oriented towards the Moore's law.

History

With the progressive externalization of production by suppliers of specialized equipment, arose the need for a clear development plan in order to plan and control future technological needs of the IC production can. Since the 1980s, took over in the U.S. Semiconductor Industry Association (SIA ), the responsibility for this coordination, which led to the creation of a roadmap in the American style, the National Technology Roadmap for Semiconductors ( NTRS ). In 1998, the SIA made ​​with their European, Japanese, Korean and Taiwanese colleagues together to create the first international development planning, the International Technology Roadmap for Semiconductors ( ITRS ).

Scope and Topics

The ITRS is a set of documents in which the requirements of future microelectronic circuits and the required measurement and systems engineering are summarized. They are considered as a guideline for the development in the field of semiconductor technology. In addition, there are several spreadsheets with forecasts for the next 15 years. The principal documents include the following topics:

  • Executive Summary
  • System Drivers
  • Design
  • Test & Test Equipment
  • Process Integration, Devices & Structures
  • RF and A / MS Technologies for Wireless Communications
  • Emerging Research Devices
  • Emerging Research Materials
  • Front End Processes
  • Lithography, deals with the techniques for structuring material areas
  • Interconnect, is concerned with the electrical connections and the intervening isolation regions in BEoL
  • Factory Integration
  • Assembly & Packaging
  • Environment, Safety & Health
  • Yield Enhancement, deals with the improvement of the yield
  • Metrology, deals with the requirements for metrology and process control
  • Modeling & Simulation, deals with the modeling and simulation
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