Low-energy ion scattering

The low-energy ion scattering spectroscopy (also called " scattering spectroscopy of low-energy ions ," engl. Low Energy Ion Scattering, LEIS ) is a surface analytical method for elemental analysis of solids. It belongs to the group of ion scattering spectroscopy ( engl. Ion Scattering Spectroscopy, ISS). Often possible to find the synonymous use of the terms ISS and LEIS in contrast to Rutherford backscattering spectrometry ( engl. Rutherford backscattering spectrometry RBS).

Description

The analysis is done by bombarding a subject present in the vacuum surface with noble gas or alkali ions. The ions (usually helium) while having energies of 1-10 keV and are scattered by the atoms in the outermost monolayer. By detecting the ions at a predetermined angle to the direction of fire and the measurement of the energy of the scattered ions can be close to the mass of the atom to which the scattering took place. From the angle dependence of the backscattered intensity can be further close to the geometric structure of the surface (in the case of single crystals ).