Tetrakis(dimethylamido)titanium

TDMAT

Light yellow liquid with fishy odor

Liquid

0.96 g · cm -3 ( at 20 ° C)

< 4 ° C.

50 ° C ( 38 hPa)

13 Pa (25 ° C)

Reacts with water

Risk

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Tetrakis (dimethylamino ) titanium ( TDMAT ) is a chemical compound that is used, for example, in semiconductor manufacture using the metal organic chemical vapor deposition (English metal organic chemical vapor deposition, MOCVD). Formally, it is the tetrakis ( dimethyl ) of the ortho-titanic acid. It can be produced by the reaction of lithium dimethylamide with titanium ( IV) chloride.

Properties and Safety

The combustible substance has a fishy odor and is due to the low flash point flammable ( depending on the source between -30 ° C and 87 ° C). With water - even from the air - to TDMAT decomposed violent reaction.

When inhaled the substance, this is extremely destructive to the respiratory tract, in contact with skin and eyes corrosive. In addition, symptoms such as cough, shortness of breath, headache, nausea and vomiting may occur.

Use

TDMAT is used in the method of chemical vapor deposition ( CVD) as a gaseous reactant. During the reaction, is formed on a substrate of the desired ultra- hard coating of titanium nitride (TiN). The advantage compared to other substrates, such as titanium (IV ) chloride ( TiCl 4 ) is the possibility to reduce the reaction temperature at ≈ 450 ° C, while TiCl4 temperatures > 900 ° C are required.