Thin-film bulk acoustic resonator

In the FBAR technology (English (thin ) film bulk acoustic wave resonator ), which was developed by the company Agilent Technologies, resonator elements are implemented on a silicon die. The functioning is similar to that of a surface acoustic wave filter ( SAW filter ), with the difference that in the FBAR technology propagation of the acoustic waves in the substrate ( "bulk ") is carried.

This technology has over existing ceramic resonators a smaller insertion loss and a significant potential for savings in the size of the components. Furthermore, this technique can be implemented with filters for frequencies of about 1 GHz.

For this technology, the BAW filters are shown.