Titanium sublimation pump

The titanium sublimation pump (TSP ) is a special ultra-high vacuum pump, which is based on the high gettering capability of freshly evaporated titanium: Titanium is evaporated onto a high purity chilled Adsorberfläche and there begins the randomly impinging gas atoms by pure chemisorption. Gases such as oxygen, nitrogen or carbon dioxide can be chemically bound to the titanium. This contrasts with the ion pump in which the gas to be pumped must first be ionized and then driving it in a static electric field for selectively Adsorberfläche.

Put simply " snaps" ( en.: "to get ", hence "getter " ) the titanium surface - so the condensed titanium - the last gas molecules, which are still present in the vacuum. After some time, the titanium surface is dirty again; a new Aufdampfzyklus regenerates again.

The effectiveness of a TSP is highly dependent on the pressure and va from the elements contained in the residual gas. Too high pressure fresh titanium surface is dirty again quickly, so that the time must be chosen very small between the Aufdampfphasen. If this time is too small, the pump will heat up considerably. Due to thermal effects, atoms can then solve again from the wall. One way to avoid this is by cooling the wall with water or liquid nitrogen ( see below). The pump is mainly used for the evacuation of particle accelerators are used.

LN2 to cool the TSP

Often the walls of a TSP, liquid nitrogen is used for cooling. This has several reasons: