Tungsten disilicide

Tungsten silicide ( ambiguous )

Blue gray solid

Fixed

9.3 g · cm -3

2160 ° C

Insoluble in water

Template: Infobox chemical / molecular formula search available

Tungsten disilicide is an inorganic chemical compound of the tungsten from the group of silicides. In addition to this there is the Pentawolframtrisilicid W5Si3 ( CAS: 12039-95-1 ).

Production and representation

Tungsten disilicide can be obtained by reaction of mono-silane, disilane, dichlorosilane or with tungsten hexafluoride.

Properties

Tungsten disilicide is a blue-gray solid that is insoluble in water. It has a tetragonal crystal structure of calcium carbide and molybdenum disilicide - type with the space group I4/mmm.

Use

Tungsten disilicide is used as a contact material in microelectronics and deposited by CVD.